Ph.D. thesis (2002)
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| Additional Information: | Le fichier PDF de ce document a été produit par Bibliothèque et Archives Canada selon les termes du programme Thèses Canada https://canada.on.worldcat.org/oclc/56108637 |
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| Department: | Department of Engineering Physics |
| Academic/Research Directors: |
Michael R. Wertheimer and Yvan Ségui
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| ISBN: | 0612759377; 9780612759374 |
| PolyPublie URL: | https://publications.polymtl.ca/7083/ |
| Institution: | École Polytechnique de Montréal |
| Date Deposited: | 04 Aug 2021 11:05 |
| Last Modified: | 08 Oct 2024 05:26 |
| Cite in APA 7: | Dennler, G. (2002). PECVD de composés de silicium sur polymères : étude de la première phase du dépôt [Ph.D. thesis, École Polytechnique de Montréal]. PolyPublie. https://publications.polymtl.ca/7083/ |
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