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Gas sensing with SU-8 whispering gallery mode resonators

Cédric Lemieux-Leduc, Régis Guertin, Marc-Antoine Bianki and Yves-Alain Peter

Conference or Workshop Item - Paper (2018)

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Cite this document: Lemieux-Leduc, C., Guertin, R., Bianki, M.-A. & Peter, Y.-A. (2018, July). Gas sensing with SU-8 whispering gallery mode resonators. Paper presented at International Conference on Optical MEMS and Nanophotonics (OMN 2018), Lausanne, Suisse (2 pages). doi:10.1109/omn.2018.8454653
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Abstract

We present an optical gas sensor using SU-8 microdisk whispering gallery mode resonators. Sensitivities were measured for different vapor phases: water, toluene, limonene and valeric acid. The highest reported sensitivity is 18.98 pm/ppm.

Uncontrolled Keywords

gas sensor; whispering gallery mode; SU-8

Open Access document in PolyPublie
Subjects: 3100 Physique > 3100 Physique
3100 Physique > 3108 Méthodes expérimentales et instrumentation
Department: Département de génie physique
Research Center: Non applicable
Funders: CRSNG/NSERC, CMC Microsystems
Date Deposited: 04 May 2021 18:05
Last Modified: 05 May 2021 01:20
PolyPublie URL: https://publications.polymtl.ca/6275/
Document issued by the official publisher
Conference Title: International Conference on Optical MEMS and Nanophotonics (OMN 2018)
Conference Location: Lausanne, Suisse
Conference Date(s): 2018-07-29 - 2018-08-02
Official URL: https://doi.org/10.1109/omn.2018.8454653

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