Cédric Lemieux-Leduc, Régis Guertin, Marc-Antoine Bianki, Yves-Alain Peter
Paper (2018)
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Abstract
We present an optical gas sensor using SU-8 microdisk whispering gallery mode resonators. Sensitivities were measured for different vapor phases: water, toluene, limonene and valeric acid. The highest reported sensitivity is 18.98 pm/ppm.
Uncontrolled Keywords
gas sensor; whispering gallery mode; SU-8
| Subjects: |
3100 Physics > 3100 Physics 3100 Physics > 3108 Experimental methods and instrumentation |
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| Department: | Department of Engineering Physics |
| Funders: | CRSNG/NSERC, CMC Microsystems |
| PolyPublie URL: | https://publications.polymtl.ca/6275/ |
| Conference Title: | International Conference on Optical MEMS and Nanophotonics (OMN 2018) |
| Conference Location: | Lausanne, Suisse |
| Conference Date(s): | 2018-07-29 - 2018-08-02 |
| Publisher: | IEEE |
| DOI: | 10.1109/omn.2018.8454653 |
| Official URL: | https://doi.org/10.1109/omn.2018.8454653 |
| Date Deposited: | 04 May 2021 18:05 |
| Last Modified: | 22 Nov 2022 04:50 |
| Cite in APA 7: | Lemieux-Leduc, C., Guertin, R., Bianki, M.-A., & Peter, Y.-A. (2018, July). Gas sensing with SU-8 whispering gallery mode resonators [Paper]. International Conference on Optical MEMS and Nanophotonics (OMN 2018), Lausanne, Suisse (2 pages). https://doi.org/10.1109/omn.2018.8454653 |
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