Cédric Lemieux-Leduc, Régis Guertin, Marc-Antoine Bianki and Yves-Alain Peter
Conference or Workshop Item - Paper (2018)
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Accepted Version Terms of Use: All rights reserved. Download (2MB) |
| Cite this document: | Lemieux-Leduc, C., Guertin, R., Bianki, M.-A. & Peter, Y.-A. (2018, July). Gas sensing with SU-8 whispering gallery mode resonators. Paper presented at International Conference on Optical MEMS and Nanophotonics (OMN 2018), Lausanne, Suisse (2 pages). doi:10.1109/omn.2018.8454653 |
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Abstract
We present an optical gas sensor using SU-8 microdisk whispering gallery mode resonators. Sensitivities were measured for different vapor phases: water, toluene, limonene and valeric acid. The highest reported sensitivity is 18.98 pm/ppm.
Uncontrolled Keywords
gas sensor; whispering gallery mode; SU-8
 Open Access document in PolyPublie |
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| Subjects: |
3100 Physique > 3100 Physique 3100 Physique > 3108 Méthodes expérimentales et instrumentation |
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| Department: | Département de génie physique |
| Research Center: | Non applicable |
| Funders: | CRSNG/NSERC, CMC Microsystems |
| Date Deposited: | 04 May 2021 18:05 |
| Last Modified: | 05 May 2021 01:20 |
| PolyPublie URL: | https://publications.polymtl.ca/6275/ |
 Document issued by the official publisher |
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| Conference Title: | International Conference on Optical MEMS and Nanophotonics (OMN 2018) |
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| Conference Location: | Lausanne, Suisse |
| Conference Date(s): | 2018-07-29 - 2018-08-02 |
| Official URL: | https://doi.org/10.1109/omn.2018.8454653 |
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