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Gas sensing with SU-8 whispering gallery mode resonators

Cédric Lemieux-Leduc, Régis Guertin, Marc-Antoine Bianki, Yves-Alain Peter

Paper (2018)

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Abstract

We present an optical gas sensor using SU-8 microdisk whispering gallery mode resonators. Sensitivities were measured for different vapor phases: water, toluene, limonene and valeric acid. The highest reported sensitivity is 18.98 pm/ppm.

Uncontrolled Keywords

gas sensor; whispering gallery mode; SU-8

Subjects: 3100 Physics > 3100 Physics
3100 Physics > 3108 Experimental methods and instrumentation
Department: Department of Engineering Physics
Funders: CRSNG/NSERC, CMC Microsystems
PolyPublie URL: https://publications.polymtl.ca/6275/
Conference Title: International Conference on Optical MEMS and Nanophotonics (OMN 2018)
Conference Location: Lausanne, Suisse
Conference Date(s): 2018-07-29 - 2018-08-02
Publisher: IEEE
DOI: 10.1109/omn.2018.8454653
Official URL: https://doi.org/10.1109/omn.2018.8454653
Date Deposited: 04 May 2021 18:05
Last Modified: 22 Nov 2022 04:50
Cite in APA 7: Lemieux-Leduc, C., Guertin, R., Bianki, M.-A., & Peter, Y.-A. (2018, July). Gas sensing with SU-8 whispering gallery mode resonators [Paper]. International Conference on Optical MEMS and Nanophotonics (OMN 2018), Lausanne, Suisse (2 pages). https://doi.org/10.1109/omn.2018.8454653

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