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High-performance, low-cost on-chip Fabry-Perot interferometer with microfluidic channel using single anisotropic wet etching

Régis Guertin, Thomas Lacasse, Cédric Lemieux-Leduc, Marc-Antoine Bianki and Yves-Alain Peter

Article (2023)

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Abstract

In this paper, we present a design for improving the fabrication process of an in-plane Fabry-Perot interferometer (FPI). The fabrication process involves a single anisotropic etching step in silicon (110) to form a resonator featuring a microfluidic channel and perpendicular structures for fiber alignment. The process etches along the crystalline planes, resulting in an almost perfectly parallel resonant cavity and reducing roughness of optical components. The FPI mirrors consist of two (111) planes coated with a thin film of evaporated gold, enhancing reflectivity. The advantage of this process is that it enables low-cost and commercial fabrication while maintaining high performance. Resonances with Q factor exceeding 2 × 10³ are reported.

Uncontrolled Keywords

Fabry-Perot; silicon (110); micromirrors; anisotropic etching; vertical etching; microfluidics;

Subjects: 1700 Design and manufacturing > 1702 Advanced manufacturing
3100 Physics > 3110 Optics (see also Photon devices, 2505)
Department: Department of Engineering Physics
Funders: CRSNG/NSERC, FRQNT
Grant number: RGPIN-2020-06692, ALLRP 577113-2022, 309032
PolyPublie URL: https://publications.polymtl.ca/53468/
Journal Title: Journal of Microelectromechanical Systems (vol. 32, no. 4)
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/jmems.2023.3278451
Official URL: https://doi.org/10.1109/jmems.2023.3278451
Date Deposited: 20 Jun 2023 16:15
Last Modified: 07 Apr 2024 05:12
Cite in APA 7: Guertin, R., Lacasse, T., Lemieux-Leduc, C., Bianki, M.-A., & Peter, Y.-A. (2023). High-performance, low-cost on-chip Fabry-Perot interferometer with microfluidic channel using single anisotropic wet etching. Journal of Microelectromechanical Systems, 32(4), 347-351. https://doi.org/10.1109/jmems.2023.3278451

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