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A 5 V MEMS gyroscope with 3 aF/°/s sensitivity, 0.6 °/√hr mechanical noise and drive-sense crosstalk minimization"

Mohannad Elsayed, Frédéric Nabki, Mohamad Sawan and Mourad El-Gamal

Paper (2011)

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Department: Department of Electrical Engineering
PolyPublie URL: https://publications.polymtl.ca/52026/
Conference Title: International Conference on Microelectronics (OCM 2011)
Conference Location: Hammamet, Tunisia
Conference Date(s): 2011-12-19 - 2011-12-22
Publisher: IEEE
DOI: 10.1109/icm.2011.6177338
Official URL: https://doi.org/10.1109/icm.2011.6177338
Date Deposited: 18 Apr 2023 15:12
Last Modified: 25 Sep 2024 16:42
Cite in APA 7: Elsayed, M., Nabki, F., Sawan, M., & El-Gamal, M. (2011, December). A 5 V MEMS gyroscope with 3 aF/°/s sensitivity, 0.6 °/√hr mechanical noise and drive-sense crosstalk minimization" [Paper]. International Conference on Microelectronics (OCM 2011), Hammamet, Tunisia (5 pages). https://doi.org/10.1109/icm.2011.6177338

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