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Microstructural origin of compressive in situ stresses in electron-gun-evaporated silica thin films

Simon Gelin, Delphine Poinot, Sebastien Chatel, Pierre-Jean Calba and Anael Lemaitre

Article (2019)

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Department: Department of Mathematics and Industrial Engineering
PolyPublie URL: https://publications.polymtl.ca/43634/
Journal Title: Physical Review Materials (vol. 3, no. 5)
Publisher: American Physical Society
DOI: 10.1103/physrevmaterials.3.055608
Official URL: https://doi.org/10.1103/physrevmaterials.3.055608
Date Deposited: 18 Apr 2023 15:01
Last Modified: 08 Apr 2025 07:08
Cite in APA 7: Gelin, S., Poinot, D., Chatel, S., Calba, P.-J., & Lemaitre, A. (2019). Microstructural origin of compressive in situ stresses in electron-gun-evaporated silica thin films. Physical Review Materials, 3(5), 055608 (19 pages). https://doi.org/10.1103/physrevmaterials.3.055608

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