Incorporation of Si during vapor phase epitaxy of III-V compounds: evidence of an enthalpy-entropy compensation effect

Rémo A. Masut

Article (2018)

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Department:	Department of Engineering Physics
Research Center:	RQMP - Regroupement québécois sur les matériaux de pointe
PolyPublie URL:	https://publications.polymtl.ca/41323/
Journal Title:	Journal of Applied Physics (vol. 124, no. 9)
Publisher:	AIP Publishing
DOI:	10.1063/1.5031106
Official URL:	https://doi.org/10.1063/1.5031106
Date Deposited:	18 Apr 2023 15:03
Last Modified:	27 Sep 2024 09:41

Cite in APA 7:	Masut, R. A. (2018). Incorporation of Si during vapor phase epitaxy of III-V compounds: evidence of an enthalpy-entropy compensation effect. Journal of Applied Physics, 124(9), 7 pages. https://doi.org/10.1063/1.5031106
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