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Incorporation of Si during vapor phase epitaxy of III-V compounds: evidence of an enthalpy-entropy compensation effect

Rémo A. Masut

Article (2018)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/41323/
Journal Title: Journal of Applied Physics (vol. 124, no. 9)
Publisher: AIP Publishing
DOI: 10.1063/1.5031106
Official URL: https://doi.org/10.1063/1.5031106
Date Deposited: 18 Apr 2023 15:03
Last Modified: 05 Apr 2024 11:38
Cite in APA 7: Masut, R. A. (2018). Incorporation of Si during vapor phase epitaxy of III-V compounds: evidence of an enthalpy-entropy compensation effect. Journal of Applied Physics, 124(9), 7 pages. https://doi.org/10.1063/1.5031106

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