<  Back to the Polytechnique Montréal portal

Silicon Nitride from Microwave Plasma: Fabrication and Characterization

Yves Tessier, Jolanta-Ewa Sapieha, S. Poulin-Dandurand and Michael R. Wertheimer

Article (2011)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38234/
Journal Title: MRS Proceedings (vol. 68)
Publisher: Cambridge University Press
DOI: 10.1557/proc-68-183
Official URL: https://doi.org/10.1557/proc-68-183
Date Deposited: 18 Apr 2023 15:12
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Tessier, Y., Sapieha, J.-E., Poulin-Dandurand, S., & Wertheimer, M. R. (2011). Silicon Nitride from Microwave Plasma: Fabrication and Characterization. MRS Proceedings, 68. https://doi.org/10.1557/proc-68-183

Statistics

Dimensions

Repository Staff Only

View Item View Item