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Dielectric properties of plasma-deposited thin films: A comparison of different materials

T. S. Ramu, Michael R. Wertheimer and Jolanta-Ewa Sapieha

Paper (1985)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38216/
Conference Title: Conference on Electrical Insulation & Dielectric Phenomena
Conference Location: Amherst, NY, USA
Conference Date(s): 1985-10-20 - 1985-10-24
Publisher: IEEE
DOI: 10.1109/ceidp.1985.7728272
Official URL: https://doi.org/10.1109/ceidp.1985.7728272
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Ramu, T. S., Wertheimer, M. R., & Sapieha, J.-E. (1985, October). Dielectric properties of plasma-deposited thin films: A comparison of different materials [Paper]. Conference on Electrical Insulation & Dielectric Phenomena, Amherst, NY, USA. https://doi.org/10.1109/ceidp.1985.7728272

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