P. Rabiller, Jolanta-Ewa Sapieha
, Michael R. Wertheimer and Arthur Yelon
Paper (1989)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/38210/ |
| Conference Title: | 3rd International Conference on Conduction and Breakdown in Solid Dielectrics |
| Conference Location: | Trondheim, Norway |
| Conference Date(s): | 1989-07-03 - 1989-07-06 |
| Publisher: | IEEE |
| DOI: | 10.1109/icsd.1989.69208 |
| Official URL: | https://doi.org/10.1109/icsd.1989.69208 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:22 |
| Cite in APA 7: | Rabiller, P., Sapieha, J.-E., Wertheimer, M. R., & Yelon, A. (1989, July). Electrical properties of a-SiOₓNy :H films prepared by microwave PECVD [Paper]. 3rd International Conference on Conduction and Breakdown in Solid Dielectrics, Trondheim, Norway. https://doi.org/10.1109/icsd.1989.69208 |
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