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Electrical properties of a-SiOₓNy :H films prepared by microwave PECVD

P. Rabiller, Jolanta-Ewa Sapieha, Michael R. Wertheimer and Arthur Yelon

Paper (1989)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38210/
Conference Title: 3rd International Conference on Conduction and Breakdown in Solid Dielectrics
Conference Location: Trondheim, Norway
Conference Date(s): 1989-07-03 - 1989-07-06
Publisher: IEEE
DOI: 10.1109/icsd.1989.69208
Official URL: https://doi.org/10.1109/icsd.1989.69208
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Rabiller, P., Sapieha, J.-E., Wertheimer, M. R., & Yelon, A. (1989, July). Electrical properties of a-SiOₓNy :H films prepared by microwave PECVD [Paper]. 3rd International Conference on Conduction and Breakdown in Solid Dielectrics, Trondheim, Norway. https://doi.org/10.1109/icsd.1989.69208

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