Philippe Rabiller, Stéphane Blain, Jolanta-Ewa Sapieha
, Michael R. Wertheimer and Arthur Yelon
Paper (1988)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/38209/ |
| Conference Title: | IEEE International Symposium on Electrical Insulation |
| Conference Date(s): | 1988-06-05 - 1988-06-08 |
| Publisher: | IEEE |
| DOI: | 10.1109/elinsl.1988.13890 |
| Official URL: | https://doi.org/10.1109/elinsl.1988.13890 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 08 Apr 2025 07:01 |
| Cite in APA 7: | Rabiller, P., Blain, S., Sapieha, J.-E., Wertheimer, M. R., & Yelon, A. (1988, June). Electrical properties of PECVD SiO/sub x/N/sub y/:H prepared by microwave plasma [Paper]. IEEE International Symposium on Electrical Insulation. https://doi.org/10.1109/elinsl.1988.13890 |
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