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Electrical properties of PECVD SiO/sub x/N/sub y/:H prepared by microwave plasma

P. Rabiller, S. Blain, Jolanta-Ewa Sapieha, Michael R. Wertheimer and Arthur Yelon

Paper (1988)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38209/
Conference Title: IEEE International Symposium on Electrical Insulation
Conference Date(s): 1988-06-05 - 1988-06-08
Publisher: IEEE
DOI: 10.1109/elinsl.1988.13890
Official URL: https://doi.org/10.1109/elinsl.1988.13890
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Rabiller, P., Blain, S., Sapieha, J.-E., Wertheimer, M. R., & Yelon, A. (1988, June). Electrical properties of PECVD SiO/sub x/N/sub y/:H prepared by microwave plasma [Paper]. IEEE International Symposium on Electrical Insulation. https://doi.org/10.1109/elinsl.1988.13890

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