Comparison of microwave and r.f. plasmas: fundamentals and applications

M. Moisan, Michael R. Wertheimer

Article (1993)

Access this document
External link
An external link is available for this item
View at the official publisher
Department:
Department of Engineering Physics
PolyPublie URL:
https://publications.polymtl.ca/38196/
Journal Title :
Surface and Coatings Technology ( vol. 59 , no. 1 )
Publisher:
Elsevier
DOI:
10.1016/0257-8972(93)90047-r
Official URL:
https://doi.org/10.1016/0257-8972%2893%2990047-r
OAI:
oai:publications.polymtl.ca:38196
ORCID
Date Deposited:
18 Apr 2023 15:26
Last Modified:
14 Oct 2026 13:29
Cite in APA 7:
Moisan, M., & Wertheimer, M. R. (1993). Comparison of microwave and r.f. plasmas: fundamentals and applications. Surface and Coatings Technology, 59(1), 1-13. https://doi.org/10.1016/0257-8972%2893%2990047-r

Statistics

Dimensions

Repository Staff Only

View Item
View Item