<  Back to the Polytechnique Montréal portal

Comparison of microwave and r.f. plasmas: fundamentals and applications

M. Moisan and Michael R. Wertheimer

Article (1993)

An external link is available for this item
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38196/
Journal Title: Surface and Coatings Technology (vol. 59, no. 1)
Publisher: Elsevier
DOI: 10.1016/0257-8972(93)90047-r
Official URL: https://doi.org/10.1016/0257-8972%2893%2990047-r
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Moisan, M., & Wertheimer, M. R. (1993). Comparison of microwave and r.f. plasmas: fundamentals and applications. Surface and Coatings Technology, 59(1), 1-13. https://doi.org/10.1016/0257-8972%2893%2990047-r

Statistics

Dimensions

Repository Staff Only

View Item View Item