M. Moisan and Michael R. Wertheimer
Article (1993)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/38196/ |
| Journal Title: | Surface and Coatings Technology (vol. 59, no. 1) |
| Publisher: | Elsevier |
| DOI: | 10.1016/0257-8972(93)90047-r |
| Official URL: | https://doi.org/10.1016/0257-8972%2893%2990047-r |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:22 |
| Cite in APA 7: | Moisan, M., & Wertheimer, M. R. (1993). Comparison of microwave and r.f. plasmas: fundamentals and applications. Surface and Coatings Technology, 59(1), 1-13. https://doi.org/10.1016/0257-8972%2893%2990047-r |
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