Amorphization of c‐Si by the sputter deposition of Au studied by x‐ray photoelectron diffraction

B. Lamontagne, Edward Sacher and Michael R. Wertheimer

Article (1992)

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Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/38188/
Journal Title:	Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 10, no. 4)
Publisher:	American Vacuum Society
DOI:	10.1116/1.578193
Official URL:	https://doi.org/10.1116/1.578193
Date Deposited:	18 Apr 2023 15:26
Last Modified:	25 Sep 2024 16:22

Cite in APA 7:	Lamontagne, B., Sacher, E., & Wertheimer, M. R. (1992). Amorphization of c‐Si by the sputter deposition of Au studied by x‐ray photoelectron diffraction. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 10(4), 1002-1005. https://doi.org/10.1116/1.578193
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