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Amorphization of c‐Si by the sputter deposition of Au studied by x‐ray photoelectron diffraction

B. Lamontagne, Edward Sacher and Michael R. Wertheimer

Article (1992)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38188/
Journal Title: Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 10, no. 4)
Publisher: American Vacuum Society
DOI: 10.1116/1.578193
Official URL: https://doi.org/10.1116/1.578193
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Lamontagne, B., Sacher, E., & Wertheimer, M. R. (1992). Amorphization of c‐Si by the sputter deposition of Au studied by x‐ray photoelectron diffraction. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 10(4), 1002-1005. https://doi.org/10.1116/1.578193

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