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Silicon-carbon reaction provoked by the sputter cleaning of lightly contaminated crystalline silicon

B. Lamontagne, Edward Sacher and Michael R. Wertheimer

Article (1991)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38187/
Journal Title: Applied Surface Science (vol. 52, no. 1)
Publisher: Elsevier
DOI: 10.1016/0169-4332(91)90116-2
Official URL: https://doi.org/10.1016/0169-4332%2891%2990116-2
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Lamontagne, B., Sacher, E., & Wertheimer, M. R. (1991). Silicon-carbon reaction provoked by the sputter cleaning of lightly contaminated crystalline silicon. Applied Surface Science, 52(1), 71-76. https://doi.org/10.1016/0169-4332%2891%2990116-2

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