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Etching of polymers in microwave/radio-frequency O2-CF4 plasma

B. Lamontagne, O. M. Küttel and Michael R. Wertheimer

Article (1991)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38186/
Journal Title: Canadian Journal of Physics (vol. 69, no. 3-4)
Publisher: Canadian Science Publishing
DOI: 10.1139/p91-033
Official URL: https://doi.org/10.1139/p91-033
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Lamontagne, B., Küttel, O. M., & Wertheimer, M. R. (1991). Etching of polymers in microwave/radio-frequency O2-CF4 plasma. Canadian Journal of Physics, 69(3-4), 202-206. https://doi.org/10.1139/p91-033

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