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Compositional characterization of microwave plasma a-Si: H films

John F. Currie, P. Depelsenaire, J. P. Huot, L. Paquin, Michael R. Wertheimer, Arthur Yelon, C. Brassard, J. L'Ecuyer, R. Groleau and J. P. Martin

Article (1983)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38151/
Journal Title: Canadian Journal of Physics (vol. 61, no. 4)
Publisher: Canadian Science Publishing
DOI: 10.1139/p83-073
Official URL: https://doi.org/10.1139/p83-073
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Currie, J. F., Depelsenaire, P., Huot, J. P., Paquin, L., Wertheimer, M. R., Yelon, A., Brassard, C., L'Ecuyer, J., Groleau, R., & Martin, J. P. (1983). Compositional characterization of microwave plasma a-Si: H films. Canadian Journal of Physics, 61(4), 582-590. https://doi.org/10.1139/p83-073

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