Stéphane Blain, Jolanta-Ewa Sapieha
, Michael R. Wertheimer and S. C. Gujrathi
Article (1989)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/38143/ |
| Journal Title: | Canadian Journal of Physics (vol. 67, no. 4) |
| Publisher: | Canadian Science Publishing |
| DOI: | 10.1139/p89-033 |
| Official URL: | https://doi.org/10.1139/p89-033 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 08 Apr 2025 07:00 |
| Cite in APA 7: | Blain, S., Sapieha, J.-E., Wertheimer, M. R., & Gujrathi, S. C. (1989). Silicon oxynitride from microwave plasma: fabrication and characterization. Canadian Journal of Physics, 67(4), 190-194. https://doi.org/10.1139/p89-033 |
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