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Silicon oxynitride from microwave plasma: fabrication and characterization

S. Blain, Jolanta-Ewa Sapieha, Michael R. Wertheimer and S. C. Gujrathi

Article (1989)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/38143/
Journal Title: Canadian Journal of Physics (vol. 67, no. 4)
Publisher: Canadian Science Publishing
DOI: 10.1139/p89-033
Official URL: https://doi.org/10.1139/p89-033
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:32
Cite in APA 7: Blain, S., Sapieha, J.-E., Wertheimer, M. R., & Gujrathi, S. C. (1989). Silicon oxynitride from microwave plasma: fabrication and characterization. Canadian Journal of Physics, 67(4), 190-194. https://doi.org/10.1139/p89-033

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