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CF₄-Ar reactive ion etching of gallium arsenide

P. Lussier, M. Bélanger, Michel Meunier and John F. Currie

Article (1989)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/35779/
Journal Title: Canadian Journal of Physics (vol. 67, no. 4)
Publisher: Canadian Science Publishing
DOI: 10.1139/p89-045
Official URL: https://doi.org/10.1139/p89-045
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:28
Cite in APA 7: Lussier, P., Bélanger, M., Meunier, M., & Currie, J. F. (1989). CF₄-Ar reactive ion etching of gallium arsenide. Canadian Journal of Physics, 67(4), 259-261. https://doi.org/10.1139/p89-045



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