P. Lussier, M. Bélanger, Michel Meunier
and John F. Currie
Article (1989)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/35779/ |
| Journal Title: | Canadian Journal of Physics (vol. 67, no. 4) |
| Publisher: | Canadian Science Publishing |
| DOI: | 10.1139/p89-045 |
| Official URL: | https://doi.org/10.1139/p89-045 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 25 Sep 2024 16:19 |
| Cite in APA 7: | Lussier, P., Bélanger, M., Meunier, M., & Currie, J. F. (1989). CF₄-Ar reactive ion etching of gallium arsenide. Canadian Journal of Physics, 67(4), 259-261. https://doi.org/10.1139/p89-045 |
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