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Plasma polymers deposited in atmospheric pressure dielectric barrier discharges: Influence of process parameters on film properties

Katja Fricke, Pierre-Luc Girard-Lauriault, Klaus-Dieter Weltmann and Michael R. Wertheimer

Article (2016)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/35056/
Journal Title: Thin Solid Films (vol. 603)
Publisher: Elsevier
DOI: 10.1016/j.tsf.2016.01.057
Official URL: https://doi.org/10.1016/j.tsf.2016.01.057
Date Deposited: 18 Apr 2023 15:05
Last Modified: 05 Apr 2024 11:27
Cite in APA 7: Fricke, K., Girard-Lauriault, P.-L., Weltmann, K.-D., & Wertheimer, M. R. (2016). Plasma polymers deposited in atmospheric pressure dielectric barrier discharges: Influence of process parameters on film properties. Thin Solid Films, 603, 119-125. https://doi.org/10.1016/j.tsf.2016.01.057

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