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Processing of electronic materials by microwave plasma

Michael R. Wertheimer and M. Moisan

Article (1994)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/32747/
Journal Title: Pure and Applied Chemistry (vol. 66, no. 6)
DOI: 10.1351/pac199466061343
Official URL: https://doi.org/10.1351/pac199466061343
Date Deposited: 18 Apr 2023 15:26
Last Modified: 05 Apr 2024 11:23
Cite in APA 7: Wertheimer, M. R., & Moisan, M. (1994). Processing of electronic materials by microwave plasma. Pure and Applied Chemistry, 66(6), 1343-1352. https://doi.org/10.1351/pac199466061343



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