Michael R. Wertheimer
and M. Moisan
Article (1994)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/32747/ |
| Journal Title: | Pure and Applied Chemistry (vol. 66, no. 6) |
| Publisher: | Walter de Gruyter |
| DOI: | 10.1351/pac199466061343 |
| Official URL: | https://doi.org/10.1351/pac199466061343 |
| Date Deposited: | 18 Apr 2023 15:26 |
| Last Modified: | 08 Apr 2025 06:53 |
| Cite in APA 7: | Wertheimer, M. R., & Moisan, M. (1994). Processing of electronic materials by microwave plasma. Pure and Applied Chemistry, 66(6), 1343-1352. https://doi.org/10.1351/pac199466061343 |
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