Geneviève Beïque, Mario Caron, John F. Currie and Michel Meunier
Article (1995)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/32588/ |
| Journal Title: | Canadian Journal of Physics (vol. 73, no. 7-8) |
| Publisher: | Canadian Science Publishing |
| DOI: | 10.1139/p95-076 |
| Official URL: | https://doi.org/10.1139/p95-076 |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 25 Sep 2024 16:15 |
| Cite in APA 7: | Beïque, G., Caron, M., Currie, J. F., & Meunier, M. (1995). Caractérisation structurale de couches minces de silicium polycristallin fabriquées par dépôt chimique en phase vapeur sous basse pression du SiH₄ et dopées en phosphore in situ. [Structural characterization of polysilicon thin-films fabricated by low-pressure chemical-deposition of silane and doped in-situ with phosphorus]. Canadian Journal of Physics, 73(7-8), 526-529. https://doi.org/10.1139/p95-076 |
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