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Laser direct writing of micron-size silicon lines from trisilane

S. Boughaba and G. Auvert

Article (1995)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/32529/
Journal Title: Journal of Applied Physics (vol. 78, no. 11)
Publisher: American Institute of Physics
DOI: 10.1063/1.360504
Official URL: https://doi.org/10.1063/1.360504
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:23
Cite in APA 7: Boughaba, S., & Auvert, G. (1995). Laser direct writing of micron-size silicon lines from trisilane. Journal of Applied Physics, 78(11), 6791-6796. https://doi.org/10.1063/1.360504

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