S. Boughaba and G. Auvert
Article (1995)
An external link is available for this item
| Department: | Department of Engineering Physics |
|---|---|
| PolyPublie URL: | https://publications.polymtl.ca/32529/ |
| Journal Title: | Journal of Applied Physics (vol. 78, no. 11) |
| Publisher: | American Institute of Physics |
| DOI: | 10.1063/1.360504 |
| Official URL: | https://doi.org/10.1063/1.360504 |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 25 Sep 2024 16:14 |
| Cite in APA 7: | Boughaba, S., & Auvert, G. (1995). Laser direct writing of micron-size silicon lines from trisilane. Journal of Applied Physics, 78(11), 6791-6796. https://doi.org/10.1063/1.360504 |
|---|---|
Statistics
Dimensions
Repository Staff Only
|
View Item |
