J. B. Héroux, S. Boughaba, Edward Sacher and Michel Meunier
Article (1996)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/31239/ |
| Journal Title: | Canadian Journal of Physics (vol. 74, no. 1) |
| Publisher: | Canadian Science Publishing |
| DOI: | 10.1139/p96-840 |
| Official URL: | https://doi.org/10.1139/p96-840 |
| Date Deposited: | 18 Apr 2023 15:24 |
| Last Modified: | 08 Apr 2025 06:51 |
| Cite in APA 7: | Héroux, J. B., Boughaba, S., Sacher, E., & Meunier, M. (1996). CO₂ laser-assisted particle removal from silicon surfaces. Canadian Journal of Physics, 74(1), 95-99. https://doi.org/10.1139/p96-840 |
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