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CO₂ laser-assisted particle removal from silicon surfaces

J. B. Héroux, S. Boughaba, Edward Sacher and Michel Meunier

Article (1996)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/31239/
Journal Title: Canadian Journal of Physics (vol. 74, no. 1)
Publisher: Canadian Science Publishing
DOI: 10.1139/p96-840
Official URL: https://doi.org/10.1139/p96-840
Date Deposited: 18 Apr 2023 15:24
Last Modified: 05 Apr 2024 11:21
Cite in APA 7: Héroux, J. B., Boughaba, S., Sacher, E., & Meunier, M. (1996). CO₂ laser-assisted particle removal from silicon surfaces. Canadian Journal of Physics, 74(1), 95-99. https://doi.org/10.1139/p96-840



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