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Laser micromachining of free-standing structures in SiO₂ -covered silicon

M. Allard, S. Boughaba and Michel Meunier

Paper (1996)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/30728/
Conference Title: Symposium H on Laser Processing of Surfaces and Thin Films of the 1996 E-MRS Spring Conference
Conference Location: Strasbourg France
Conference Date(s): 1996-06-04
Journal Title: Applied surface science (vol. 109-110)
Publisher: Elsevier
DOI: 10.1016/s0169-4332(96)00658-7
Official URL: https://doi.org/10.1016/s0169-4332%2896%2900658-7
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:20
Cite in APA 7: Allard, M., Boughaba, S., & Meunier, M. (1996, June). Laser micromachining of free-standing structures in SiO₂ -covered silicon [Paper]. Symposium H on Laser Processing of Surfaces and Thin Films of the 1996 E-MRS Spring Conference, Strasbourg France. Published in Applied surface science, 109-110. https://doi.org/10.1016/s0169-4332%2896%2900658-7

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