M. Allard, S. Boughaba and Michel Meunier
Paper (1996)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/30728/ |
| Conference Title: | Symposium H on Laser Processing of Surfaces and Thin Films of the 1996 E-MRS Spring Conference |
| Conference Location: | Strasbourg France |
| Conference Date(s): | 1996-06-04 |
| Journal Title: | Applied surface science (vol. 109-110) |
| Publisher: | Elsevier |
| DOI: | 10.1016/s0169-4332(96)00658-7 |
| Official URL: | https://doi.org/10.1016/s0169-4332%2896%2900658-7 |
| Date Deposited: | 18 Apr 2023 15:23 |
| Last Modified: | 25 Sep 2024 16:12 |
| Cite in APA 7: | Allard, M., Boughaba, S., & Meunier, M. (1996, June). Laser micromachining of free-standing structures in SiO₂ -covered silicon [Paper]. Symposium H on Laser Processing of Surfaces and Thin Films of the 1996 E-MRS Spring Conference, Strasbourg France. Published in Applied surface science, 109-110. https://doi.org/10.1016/s0169-4332%2896%2900658-7 |
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