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Characterization of defects in PECVD-SiO₂ coatings on PET by confocal microscopy

A. S. da Silva Sobrinho, J. Chasle, G. Dennler and Michael R. Wertheimer

Article (1998)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/29747/
Journal Title: Plasmas and Polymers (vol. 3, no. 4)
Publisher: Kluwer Academic Publishers
DOI: 10.1023/a:1021854805605
Official URL: https://doi.org/10.1023/a%3a1021854805605
Date Deposited: 18 Apr 2023 15:23
Last Modified: 05 Apr 2024 11:18
Cite in APA 7: da Silva Sobrinho, A. S., Chasle, J., Dennler, G., & Wertheimer, M. R. (1998). Characterization of defects in PECVD-SiO₂ coatings on PET by confocal microscopy. Plasmas and Polymers, 3(4), 231-247. https://doi.org/10.1023/a%3a1021854805605

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