Plasma-Deposited Silicon Oxide and Silicon Nitride Films on Poly(Ethylene Terephthalate): a Multitechnique Study of the Interphase Regions

A. S. D. Sobrinho, N. Schühler, Jolanta-Ewa Sapieha, Michael R. Wertheimer, M. Andrews and S. C. Gujrathi

Article (1998)

An external link is available for this item

Additional Information:	Nom historique du département: Département de génie physique et de génie des matériaux
Department:	Department of Engineering Physics
Research Center:	GCM - Thin Film Physics and Technology Research Group
PolyPublie URL:	https://publications.polymtl.ca/29308/
Journal Title:	Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 4)
Publisher:	American Vacuum Society
DOI:	10.1116/1.581305
Official URL:	https://doi.org/10.1116/1.581305
Date Deposited:	18 Apr 2023 15:23
Last Modified:	08 Apr 2025 02:19

Cite in APA 7:	Sobrinho, A. S. D., Schühler, N., Sapieha, J.-E., Wertheimer, M. R., Andrews, M., & Gujrathi, S. C. (1998). Plasma-Deposited Silicon Oxide and Silicon Nitride Films on Poly(Ethylene Terephthalate): a Multitechnique Study of the Interphase Regions. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(4), 2021-2030. https://doi.org/10.1116/1.581305
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Simple Metadata

Statistics

Dimensions

Repository Staff Only

View Item