Plasma-Deposited Silicon Oxide and Silicon Nitride Films on Poly(Ethylene Terephthalate): a Multitechnique Study of the Interphase Regions

A. S. D. Sobrinho, N. Schühler, Jolanta-Ewa Sapieha, Michael R. Wertheimer, M. Andrews and S. C. Gujrathi

Article (1998)

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Additional Information:	Nom historique du département: Département de génie physique et de génie des matériaux
Department:	Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/29308/
Journal Title:	Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 4)
Publisher:	American Vacuum Society
DOI:	10.1116/1.581305
Official URL:	https://doi.org/10.1116/1.581305
Date Deposited:	18 Apr 2023 15:23
Last Modified:	08 Jun 2023 11:37

Cite in APA 7:	Sobrinho, A. S. D., Schühler, N., Sapieha, J.-E., Wertheimer, M. R., Andrews, M., & Gujrathi, S. C. (1998). Plasma-Deposited Silicon Oxide and Silicon Nitride Films on Poly(Ethylene Terephthalate): a Multitechnique Study of the Interphase Regions. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(4), 2021-2030. https://doi.org/10.1116/1.581305
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