A. S. D. Sobrinho, N. Schühler, Jolanta-Ewa Sapieha, Michael R. Wertheimer
, M. Andrews and S. C. Gujrathi
Article (1998)
An external link is available for this itemAdditional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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Department: | Department of Engineering Physics |
PolyPublie URL: | https://publications.polymtl.ca/29308/ |
Journal Title: | Journal of vacuum science and technology. A, Vacuum, surfaces, and films (vol. 16, no. 4) |
Publisher: | American Vacuum Society |
DOI: | 10.1116/1.581305 |
Official URL: | https://doi.org/10.1116/1.581305 |
Date Deposited: | 18 Apr 2023 15:23 |
Last Modified: | 08 Jun 2023 11:37 |
Cite in APA 7: | Sobrinho, A. S. D., Schühler, N., Sapieha, J.-E., Wertheimer, M. R., Andrews, M., & Gujrathi, S. C. (1998). Plasma-Deposited Silicon Oxide and Silicon Nitride Films on Poly(Ethylene Terephthalate): a Multitechnique Study of the Interphase Regions. Journal of vacuum science and technology. A, Vacuum, surfaces, and films, 16(4), 2021-2030. https://doi.org/10.1116/1.581305 |
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