A. S. Da Silva Sobrinho, G. Czeremuszkin, M. Latrèche and Michael R. Wertheimer
Paper (1998)
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| Additional Information: | Nom historique du département: Département de génie physique et de génie des matériaux |
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| Department: | Department of Engineering Physics |
| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/29016/ |
| Conference Title: | 1998 MRS Fall Meeting: Symposium on Plasma Deposition and Treatment of Polymers |
| Conference Location: | Boston, MA |
| Conference Date(s): | 1998-11-30 - 1998-12-02 |
| Journal Title: | Materials Research Society Symposium - Proceedings (vol. 544) |
| Publisher: | Materials Research Society |
| DOI: | 10.1557/proc-544-245 |
| Official URL: | https://doi.org/10.1557/proc-544-245 |
| Date Deposited: | 18 Apr 2023 15:22 |
| Last Modified: | 25 Sep 2024 16:10 |
| Cite in APA 7: | Da Silva Sobrinho, A. S., Czeremuszkin, G., Latrèche, M., & Wertheimer, M. R. (1998, November). Study of defect numbers and distributions in PECVD SIO//2 transparent barrier coatings on pet [Paper]. 1998 MRS Fall Meeting: Symposium on Plasma Deposition and Treatment of Polymers, Boston, MA. Published in Materials Research Society Symposium - Proceedings, 544. https://doi.org/10.1557/proc-544-245 |
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