Solvent-assisted lithographic process using photosensitive sol-gel derived glass for depositing ridge waveguides on silicon

M. Amir Farfad, S. Iraj Najafi and Mark P. Andrews

Patent (2000)

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Additional Information:	Nom historique du département: Département de génie électrique et de génie informatique
Department:	Department of Electrical Engineering Department of Computer Engineering and Software Engineering
PolyPublie URL:	https://publications.polymtl.ca/28198/
Official URL:	https://patents.google.com/patent/US6054253
Date Deposited:	18 Apr 2023 15:21
Last Modified:	25 Sep 2024 16:09

Cite in APA 7:	Farfad, M. A., Najafi, S. I., & Andrews, M. P. (2000). Solvent-assisted lithographic process using photosensitive sol-gel derived glass for depositing ridge waveguides on silicon. (Patent no. US6054253). https://patents.google.com/patent/US6054253
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