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Solvent-assisted lithographic process using photosensitive sol-gel derived glass for depositing ridge waveguides on silicon

M. Amir Farfad, S. Iraj Najafi and Mark P. Andrews

Patent (2000)

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Additional Information: Nom historique du département: Département de génie électrique et de génie informatique
Department: Department of Electrical Engineering
Department of Computer Engineering and Software Engineering
PolyPublie URL: https://publications.polymtl.ca/28198/
Official URL: https://patents.google.com/patent/US6054253
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:16
Cite in APA 7: Farfad, M. A., Najafi, S. I., & Andrews, M. P. (2000). Solvent-assisted lithographic process using photosensitive sol-gel derived glass for depositing ridge waveguides on silicon. (Patent no. US6054253). https://patents.google.com/patent/US6054253

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