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Excimer laser-induced removal of particles from silicon surfaces

Xioguang Wu

Ph.D. thesis (2000)

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Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
Academic/Research Directors: Michel Meunier and Edward Sacher
PolyPublie URL: https://publications.polymtl.ca/27746/
Institution: École Polytechnique de Montréal
Date Deposited: 18 Apr 2023 15:22
Last Modified: 29 Oct 2023 17:42
Cite in APA 7: Wu, X. (2000). Excimer laser-induced removal of particles from silicon surfaces [Ph.D. thesis, École Polytechnique de Montréal]. PolyPublie. https://publications.polymtl.ca/27746/

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