Excimer laser-induced removal of particles from silicon surfaces

Xioguang Wu

Ph.D. thesis (2000)

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Additional Information:	Nom historique du département: Département de génie physique et de génie des matériaux
Department:	Department of Engineering Physics
Academic/Research Directors:	Michel Meunier and Edward Sacher
PolyPublie URL:	https://publications.polymtl.ca/27746/
Institution:	École Polytechnique de Montréal
Date Deposited:	18 Apr 2023 15:22
Last Modified:	01 Oct 2024 10:06

Cite in APA 7:	Wu, X. (2000). Excimer laser-induced removal of particles from silicon surfaces [Ph.D. thesis, École Polytechnique de Montréal]. PolyPublie. https://publications.polymtl.ca/27746/
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