<  Back to the Polytechnique Montréal portal

The Modeling of Excimer Laser Particle Removal From Hydrophilic Silicon Surfaces

X. Wu, Edward Sacher and Michel Meunier

Article (2000)

An external link is available for this item
Additional Information: Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/27744/
Journal Title: Journal of Applied Physics (vol. 87, no. 8)
Publisher: American Institute of Physics
DOI: 10.1063/1.372391
Official URL: https://doi.org/10.1063/1.372391
Date Deposited: 18 Apr 2023 15:22
Last Modified: 05 Apr 2024 11:15
Cite in APA 7: Wu, X., Sacher, E., & Meunier, M. (2000). The Modeling of Excimer Laser Particle Removal From Hydrophilic Silicon Surfaces. Journal of Applied Physics, 87(8), 3618-3627. https://doi.org/10.1063/1.372391

Statistics

Dimensions

Repository Staff Only

View Item View Item