A novel laser trimming technique for microelectronics

Michel Meunier, Yves Gagnon, Yvon Savaria, Alain Lacourse and Maxime Cadotte

Paper (2001)

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Additional Information:	Nom historique du département: Département de génie électrique et de génie informatique; Nom historique du département: Département de génie physique et de génie des matériaux
Department:	Department of Electrical Engineering Department of Computer Engineering and Software Engineering Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/27197/
Conference Title:	6th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 2001)
Publisher:	SPIE - International Society for Optical Engineering
DOI:	10.1117/12.432531
Official URL:	https://doi.org/10.1117/12.432531
Date Deposited:	18 Apr 2023 15:21
Last Modified:	08 Apr 2025 02:16

Cite in APA 7:	Meunier, M., Gagnon, Y., Savaria, Y., Lacourse, A., & Cadotte, M. A novel laser trimming technique for microelectronics [Paper]. 6th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 2001). https://doi.org/10.1117/12.432531
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