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A novel laser trimming technique for microelectronics

Michel Meunier, Y. Gagnon, Yvon Savaria, A. Lacourse and Maxime Cadotte

Paper (2001)

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Additional Information: Nom historique du département: Département de génie électrique et de génie informatique;
Nom historique du département: Département de génie physique et de génie des matériaux
Department: Department of Electrical Engineering
Department of Computer Engineering and Software Engineering
Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/27197/
Conference Title: 6th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 2001)
Publisher: SPIE - International Society for Optical Engineering
DOI: 10.1117/12.432531
Official URL: https://doi.org/10.1117/12.432531
Date Deposited: 18 Apr 2023 15:21
Last Modified: 05 Apr 2024 11:14
Cite in APA 7: Meunier, M., Gagnon, Y., Savaria, Y., Lacourse, A., & Cadotte, M. A novel laser trimming technique for microelectronics [Paper]. 6th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 2001). https://doi.org/10.1117/12.432531

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