A novel laser trimming technique for microelectronics

Michel Meunier, Y. Gagnon, Yvon Savaria, A. Lacourse and Maxime Cadotte

Paper (2001)

An external link is available for this item

Additional Information:	Nom historique du département: Département de génie électrique et de génie informatique; Nom historique du département: Département de génie physique et de génie des matériaux
Department:	Department of Electrical Engineering Department of Computer Engineering and Software Engineering Department of Engineering Physics
PolyPublie URL:	https://publications.polymtl.ca/27197/
Conference Title:	6th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 2001)
Publisher:	SPIE - International Society for Optical Engineering
DOI:	10.1117/12.432531
Official URL:	https://doi.org/10.1117/12.432531
Date Deposited:	18 Apr 2023 15:21
Last Modified:	25 Sep 2024 16:07

Cite in APA 7:	Meunier, M., Gagnon, Y., Savaria, Y., Lacourse, A., & Cadotte, M. A novel laser trimming technique for microelectronics [Paper]. 6th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM 2001). https://doi.org/10.1117/12.432531
APA 7 (HTML)ASCII CitationAtomBibTeXDOIsDublin CoreEndNote (.ENW)MARC (ISO 2709/UTF-8) (.MRC)MARC (UTF-8) (.MRK8)MARC XMLMPEG-21 DIDLMultiline CSVOAI-ORE Resource Map (Atom Format)OPENAIREOpenURL ContextObjectOpenURL ContextObject in SpanRDF+N-TriplesRDF+N3RDF+XMLReferReference Manager (.RIS)Répertoire des publications (EndNote)Simple Metadata

Statistics

Repository Staff Only