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A novel laser trimming technique for microelectronics

Michel Meunier, Y. Gagnon, Yvon Savaria, A. Lacourse and M. Cadotte

Paper (2001)

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Department: Department of Electrical Engineering
Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/26427/
Conference Title: European Materials Research Society 2001-Symposium L "Photon-Induced Surface Processing"
Conference Location: Strasbourg, France
Conference Date(s): 2001-06-05
Journal Title: Applied Surface Science (vol. 186, no. 1-4)
Publisher: Elsevier
DOI: 10.1016/s0169-4332(01)00622-5
Official URL: https://doi.org/10.1016/s0169-4332%2801%2900622-5
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:13
Cite in APA 7: Meunier, M., Gagnon, Y., Savaria, Y., Lacourse, A., & Cadotte, M. (2001, June). A novel laser trimming technique for microelectronics [Paper]. European Materials Research Society 2001-Symposium L "Photon-Induced Surface Processing", Strasbourg, France. Published in Applied Surface Science, 186(1-4). https://doi.org/10.1016/s0169-4332%2801%2900622-5

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