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Laser tuning silicon microdevices for analogue microelectronics

Michel Meunier, Y. Gagnon, Yvon Savaria and A. Lacourse

Paper (2002)

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Department: Department of Engineering Physics
Department of Electrical Engineering
PolyPublie URL: https://publications.polymtl.ca/26425/
Conference Title: SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging (Opto Canada 2002)
Conference Location: Ottawa, ON, Canada
Conference Date(s): 2002-05-09 - 2002-05-10
Publisher: Society of photo-optical instrumentation engineers (SPIE)
DOI: 10.1117/12.2283872
Official URL: https://doi.org/10.1117/12.2283872
Date Deposited: 18 Apr 2023 15:20
Last Modified: 05 Apr 2024 11:13
Cite in APA 7: Meunier, M., Gagnon, Y., Savaria, Y., & Lacourse, A. (2002, May). Laser tuning silicon microdevices for analogue microelectronics [Paper]. SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging (Opto Canada 2002), Ottawa, ON, Canada. https://doi.org/10.1117/12.2283872

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