De Quan Yang, Edward Sacher and Michel Meunier
Article (2004)
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| Department: | Department of Engineering Physics |
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| Research Center: | GCM - Thin Film Physics and Technology Research Group |
| PolyPublie URL: | https://publications.polymtl.ca/24512/ |
| Journal Title: | Applied Surface Science (vol. 222, no. 1-4) |
| Publisher: | Elsevier |
| DOI: | 10.1016/j.apsusc.2003.09.025 |
| Official URL: | https://doi.org/10.1016/j.apsusc.2003.09.025 |
| Date Deposited: | 18 Apr 2023 15:19 |
| Last Modified: | 25 Sep 2024 16:04 |
| Cite in APA 7: | Yang, D. Q., Sacher, E., & Meunier, M. (2004). The early stages of silicon surface damage induced by pulsed CO₂ laser radiation: an AFM study. Applied Surface Science, 222(1-4), 365-373. https://doi.org/10.1016/j.apsusc.2003.09.025 |
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