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The early stages of silicon surface damage induced by pulsed CO₂ laser radiation: an AFM study

De Quan Yang, Edward Sacher and Michel Meunier

Article (2004)

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Department: Department of Engineering Physics
Research Center: GCM - Thin Film Physics and Technology Research Group
PolyPublie URL: https://publications.polymtl.ca/24512/
Journal Title: Applied Surface Science (vol. 222, no. 1-4)
Publisher: Elsevier
DOI: 10.1016/j.apsusc.2003.09.025
Official URL: https://doi.org/10.1016/j.apsusc.2003.09.025
Date Deposited: 18 Apr 2023 15:19
Last Modified: 05 Apr 2024 11:10
Cite in APA 7: Yang, D. Q., Sacher, E., & Meunier, M. (2004). The early stages of silicon surface damage induced by pulsed CO₂ laser radiation: an AFM study. Applied Surface Science, 222(1-4), 365-373. https://doi.org/10.1016/j.apsusc.2003.09.025

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