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On the differential flatness and control of electrostatically actuated MEMS

Guchuan Zhu, Jean Lévine and Laurent Praly

Paper (2005)

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Department: Department of Electrical Engineering
ISBN: 0780390989
PolyPublie URL: https://publications.polymtl.ca/23496/
Conference Title: American Control Conference (ACC 2005)
Conference Location: Portland, OR, United States
Conference Date(s): 2005-06-08 - 2005-06-10
Publisher: IEEE
DOI: 10.1109/acc.2005.1470341
Official URL: https://doi.org/10.1109/acc.2005.1470341
Date Deposited: 18 Apr 2023 15:19
Last Modified: 08 Apr 2025 02:11
Cite in APA 7: Zhu, G., Lévine, J., & Praly, L. (2005, June). On the differential flatness and control of electrostatically actuated MEMS [Paper]. American Control Conference (ACC 2005), Portland, OR, United States. https://doi.org/10.1109/acc.2005.1470341

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