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A New Model of Fringing Capacitance and its Application to the Control of Parallel-Plate Electrostatic Micro Actuators

M. Hosseini, Guchuan Zhu and Yves-Alain Peter

Paper (2006)

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Department: Department of Engineering Physics
Department of Electrical Engineering
PolyPublie URL: https://publications.polymtl.ca/22969/
Conference Title: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2006)
Conference Location: Stresa, Italy
Conference Date(s): 2006-01-01 - 2006-12-31
DOI: 10.48550/arxiv.0711.3335
Official URL: https://doi.org/10.48550/arxiv.0711.3335
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:07
Cite in APA 7: Hosseini, M., Zhu, G., & Peter, Y.-A. (2006, January). A New Model of Fringing Capacitance and its Application to the Control of Parallel-Plate Electrostatic Micro Actuators [Paper]. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2006), Stresa, Italy. https://doi.org/10.48550/arxiv.0711.3335

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