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2D dopant determination in laser-diffused Si resistors using dopant-selective etching

Y. Liao, J.-Y. Degorce, J. Belisle and Michel Meunier

Article (2006)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22833/
Journal Title: Journal of The Electrochemical Society (vol. 153, no. 1)
Publisher: The Electrochemical Society
DOI: 10.1149/1.2128099
Official URL: https://doi.org/10.1149/1.2128099
Date Deposited: 18 Apr 2023 15:17
Last Modified: 05 Apr 2024 11:07
Cite in APA 7: Liao, Y., Degorce, J.-Y., Belisle, J., & Meunier, M. (2006). 2D dopant determination in laser-diffused Si resistors using dopant-selective etching. Journal of The Electrochemical Society, 153(1), 16-22. https://doi.org/10.1149/1.2128099

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