Y. Liao, J.-Y. Degorce, J. Belisle and Michel Meunier
Article (2006)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/22833/ |
| Journal Title: | Journal of The Electrochemical Society (vol. 153, no. 1) |
| Publisher: | The Electrochemical Society |
| DOI: | 10.1149/1.2128099 |
| Official URL: | https://doi.org/10.1149/1.2128099 |
| Date Deposited: | 18 Apr 2023 15:17 |
| Last Modified: | 25 Sep 2024 16:02 |
| Cite in APA 7: | Liao, Y., Degorce, J.-Y., Belisle, J., & Meunier, M. (2006). 2D dopant determination in laser-diffused Si resistors using dopant-selective etching. Journal of The Electrochemical Society, 153(1), 16-22. https://doi.org/10.1149/1.2128099 |
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