Yves-Alain Peter
, Fatou Binetou Kone, Jonathan Masson and Nicolas Godbout
Paper (2006)
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| Department: | Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/22635/ |
| Conference Title: | Optomechatronic Micro/Nano Devices and Components II |
| Conference Location: | Boston, MA, United States |
| Conference Date(s): | 2006-10-03 - 2006-10-04 |
| Publisher: | International Society for Optical Engineering |
| DOI: | 10.1117/12.690773 |
| Official URL: | https://doi.org/10.1117/12.690773 |
| Date Deposited: | 18 Apr 2023 15:18 |
| Last Modified: | 25 Sep 2024 16:01 |
| Cite in APA 7: | Peter, Y.-A., Kone, F. B., Masson, J., & Godbout, N. (2006, October). Tunable micro-electromechanical grating in silicon [Paper]. Optomechatronic Micro/Nano Devices and Components II, Boston, MA, United States. https://doi.org/10.1117/12.690773 |
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