An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro actuators

Guchuan Zhu, Jean-François Chianetta, Mehran Hosseini and Yves-Alain Peter

Paper (2006)

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Department:	Department of Engineering Physics Department of Electrical Engineering
PolyPublie URL:	https://publications.polymtl.ca/22355/
Conference Title:	Optomechatronic Actuators, Manipulation, and Systems Control
Conference Location:	Boston, MA, United States
Conference Date(s):	2006-10-01 - 2006-10-03
Publisher:	International Society for Optical Engineering
DOI:	10.1117/12.692301
Official URL:	https://doi.org/10.1117/12.692301
Date Deposited:	18 Apr 2023 15:18
Last Modified:	25 Sep 2024 16:01

Cite in APA 7:	Zhu, G., Chianetta, J.-F., Hosseini, M., & Peter, Y.-A. (2006, October). An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro actuators [Paper]. Optomechatronic Actuators, Manipulation, and Systems Control, Boston, MA, United States. https://doi.org/10.1117/12.692301
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