<  Back to the Polytechnique Montréal portal

An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro actuators

Guchuan Zhu, Jean-François Chianetta, Mehran Hosseini and Yves-Alain Peter

Paper (2006)

An external link is available for this item
Department: Department of Engineering Physics
Department of Electrical Engineering
PolyPublie URL: https://publications.polymtl.ca/22355/
Conference Title: Optomechatronic Actuators, Manipulation, and Systems Control
Conference Location: Boston, MA, United States
Conference Date(s): 2006-10-01 - 2006-10-03
Publisher: International Society for Optical Engineering
DOI: 10.1117/12.692301
Official URL: https://doi.org/10.1117/12.692301
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:06
Cite in APA 7: Zhu, G., Chianetta, J.-F., Hosseini, M., & Peter, Y.-A. (2006, October). An investigation of phenomenal parasitics and robust control of parallel-plate electrostatic micro actuators [Paper]. Optomechatronic Actuators, Manipulation, and Systems Control, Boston, MA, United States. https://doi.org/10.1117/12.692301

Statistics

Dimensions

Repository Staff Only

View Item View Item