Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties

Guchuan Zhu, Julien Penet and Lahcen Saydy

Paper (2006)

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Department:	Department of Electrical Engineering
ISBN:	1424402093
PolyPublie URL:	https://publications.polymtl.ca/22354/
Conference Title:	American Control Conference (ACC 2006)
Conference Location:	Minneapolis, MN, USA
Conference Date(s):	2006-06-14 - 2006-06-16
Publisher:	IEEE
DOI:	10.1109/acc.2006.1656386
Official URL:	https://doi.org/10.1109/acc.2006.1656386
Date Deposited:	18 Apr 2023 15:18
Last Modified:	08 Apr 2025 02:10

Cite in APA 7:	Zhu, G., Penet, J., & Saydy, L. (2006, June). Robust control of an electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties [Paper]. American Control Conference (ACC 2006), Minneapolis, MN, USA. https://doi.org/10.1109/acc.2006.1656386
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