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Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: a Simulation Study

Guchuan Zhu, J. Levine, L. Praly and Yves-Alain Peter

Article (2006)

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Department: Department of Engineering Physics
Department of Electrical Engineering
PolyPublie URL: https://publications.polymtl.ca/22353/
Journal Title: Journal of Microelectromechanical Systems (vol. 15, no. 5)
Publisher: IEEE
DOI: 10.1109/jmems.2006.880198
Official URL: https://doi.org/10.1109/jmems.2006.880198
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:06
Cite in APA 7: Zhu, G., Levine, J., Praly, L., & Peter, Y.-A. (2006). Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: a Simulation Study. Journal of Microelectromechanical Systems, 15(5), 1165-1174. https://doi.org/10.1109/jmems.2006.880198

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