Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: a Simulation Study

Guchuan Zhu, Jean Lévine, Laurent Praly and Yves-Alain Peter

Article (2006)

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Department:	Department of Engineering Physics Department of Electrical Engineering
PolyPublie URL:	https://publications.polymtl.ca/22353/
Journal Title:	Journal of Microelectromechanical Systems (vol. 15, no. 5)
Publisher:	IEEE
DOI:	10.1109/jmems.2006.880198
Official URL:	https://doi.org/10.1109/jmems.2006.880198
Date Deposited:	18 Apr 2023 15:18
Last Modified:	08 Apr 2025 02:10

Cite in APA 7:	Zhu, G., Lévine, J., Praly, L., & Peter, Y.-A. (2006). Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: a Simulation Study. Journal of Microelectromechanical Systems, 15(5), 1165-1174. https://doi.org/10.1109/jmems.2006.880198
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