Guchuan Zhu, J. Levine, L. Praly and Yves-Alain Peter
Article (2006)
An external link is available for this itemDepartment: |
Department of Engineering Physics Department of Electrical Engineering |
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PolyPublie URL: | https://publications.polymtl.ca/22353/ |
Journal Title: | Journal of Microelectromechanical Systems (vol. 15, no. 5) |
Publisher: | IEEE |
DOI: | 10.1109/jmems.2006.880198 |
Official URL: | https://doi.org/10.1109/jmems.2006.880198 |
Date Deposited: | 18 Apr 2023 15:18 |
Last Modified: | 25 Sep 2024 16:01 |
Cite in APA 7: | Zhu, G., Levine, J., Praly, L., & Peter, Y.-A. (2006). Flatness-Based Control of Electrostatically Actuated MEMS With Application to Adaptive Optics: a Simulation Study. Journal of Microelectromechanical Systems, 15(5), 1165-1174. https://doi.org/10.1109/jmems.2006.880198 |
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