Guchuan Zhu
, Muthukumaran Packirisamy, Mehran Hosseini and Yves-Alain Peter
Article (2006)
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| Department: |
Department of Electrical Engineering Department of Engineering Physics |
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| PolyPublie URL: | https://publications.polymtl.ca/22352/ |
| Journal Title: | Journal of Micromechanics and Microengineering (vol. 16, no. 10) |
| Publisher: | IOP Publishing |
| DOI: | 10.1088/0960-1317/16/10/017 |
| Official URL: | https://doi.org/10.1088/0960-1317/16/10/017 |
| Date Deposited: | 18 Apr 2023 15:18 |
| Last Modified: | 25 Sep 2024 16:01 |
| Cite in APA 7: | Zhu, G., Packirisamy, M., Hosseini, M., & Peter, Y.-A. (2006). Modelling and Control of an Electrostatically Actuated Torsional Micromirror. Journal of Micromechanics and Microengineering, 16(10), 2044-2052. https://doi.org/10.1088/0960-1317/16/10/017 |
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