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Modelling and Control of an Electrostatically Actuated Torsional Micromirror

Guchuan Zhu, Muthukumaran Packirisamy, Mehran Hosseini and Yves-Alain Peter

Article (2006)

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Department: Department of Electrical Engineering
Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/22352/
Journal Title: Journal of Micromechanics and Microengineering (vol. 16, no. 10)
Publisher: IOP Publishing
DOI: 10.1088/0960-1317/16/10/017
Official URL: https://doi.org/10.1088/0960-1317/16/10/017
Date Deposited: 18 Apr 2023 15:18
Last Modified: 05 Apr 2024 11:06
Cite in APA 7: Zhu, G., Packirisamy, M., Hosseini, M., & Peter, Y.-A. (2006). Modelling and Control of an Electrostatically Actuated Torsional Micromirror. Journal of Micromechanics and Microengineering, 16(10), 2044-2052. https://doi.org/10.1088/0960-1317/16/10/017

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