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Nonlinear closed-loop control of an electrostatic torsional micro-mirror by means of differential actuation

C.-G. Agudelo, Guchuan Zhu and Lahcen Saydy

Paper (2007)

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Department: Department of Electrical Engineering
PolyPublie URL: https://publications.polymtl.ca/22328/
Conference Title: IEEE Northeast Workshop on Circuits and Systems (NEWCAS 2007)
Conference Location: Montréal, Québec
Conference Date(s): 2007-08-05 - 2007-08-08
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/mwscas.2007.4488665
Official URL: https://doi.org/10.1109/mwscas.2007.4488665
Date Deposited: 18 Apr 2023 15:16
Last Modified: 05 Apr 2024 11:06
Cite in APA 7: Agudelo, C.-G., Zhu, G., & Saydy, L. (2007, August). Nonlinear closed-loop control of an electrostatic torsional micro-mirror by means of differential actuation [Paper]. IEEE Northeast Workshop on Circuits and Systems (NEWCAS 2007), Montréal, Québec. https://doi.org/10.1109/mwscas.2007.4488665

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