Nonlinear closed-loop control of an electrostatic torsional micro-mirror by means of differential actuation

Carlos G. Agudelo, Guchuan Zhu and Lahcen Saydy

Paper (2007)

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Department:	Department of Electrical Engineering
ISBN:	1424411645
PolyPublie URL:	https://publications.polymtl.ca/22328/
Conference Title:	IEEE Northeast Workshop on Circuits and Systems (NEWCAS 2007)
Conference Location:	Montréal, Québec
Conference Date(s):	2007-08-05 - 2007-08-08
Publisher:	Institute of Electrical and Electronics Engineers
DOI:	10.1109/mwscas.2007.4488665
Official URL:	https://doi.org/10.1109/mwscas.2007.4488665
Date Deposited:	18 Apr 2023 15:16
Last Modified:	08 Apr 2025 02:10

Cite in APA 7:	Agudelo, C. G., Zhu, G., & Saydy, L. (2007, August). Nonlinear closed-loop control of an electrostatic torsional micro-mirror by means of differential actuation [Paper]. IEEE Northeast Workshop on Circuits and Systems (NEWCAS 2007), Montréal, Québec. https://doi.org/10.1109/mwscas.2007.4488665
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