A New Formulation of Fringing Capacitance and Its Application to the Control of Parallel-Plate Electrostatic Micro Actuators

M. Hosseini, Guchuan Zhu and Yves-Alain Peter

Article (2007)

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Department:	Department of Engineering Physics Department of Electrical Engineering
PolyPublie URL:	https://publications.polymtl.ca/21859/
Journal Title:	Analog Integrated Circuits and Signal Processing (vol. 53, no. 2-3)
Publisher:	Springer
DOI:	10.1007/s10470-007-9067-3
Official URL:	https://doi.org/10.1007/s10470-007-9067-3
Date Deposited:	18 Apr 2023 15:16
Last Modified:	08 Apr 2025 02:09

Cite in APA 7:	Hosseini, M., Zhu, G., & Peter, Y.-A. (2007). A New Formulation of Fringing Capacitance and Its Application to the Control of Parallel-Plate Electrostatic Micro Actuators. Analog Integrated Circuits and Signal Processing, 53(2-3), 119-128. https://doi.org/10.1007/s10470-007-9067-3
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