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A New Formulation of Fringing Capacitance and Its Application to the Control of Parallel-Plate Electrostatic Micro Actuators

M. Hosseini, Guchuan Zhu and Yves-Alain Peter

Article (2007)

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Department: Department of Engineering Physics
Department of Electrical Engineering
PolyPublie URL: https://publications.polymtl.ca/21859/
Journal Title: Analog Integrated Circuits and Signal Processing (vol. 53, no. 2-3)
Publisher: Springer
DOI: 10.1007/s10470-007-9067-3
Official URL: https://doi.org/10.1007/s10470-007-9067-3
Date Deposited: 18 Apr 2023 15:16
Last Modified: 05 Apr 2024 11:05
Cite in APA 7: Hosseini, M., Zhu, G., & Peter, Y.-A. (2007). A New Formulation of Fringing Capacitance and Its Application to the Control of Parallel-Plate Electrostatic Micro Actuators. Analog Integrated Circuits and Signal Processing, 53(2-3), 119-128. https://doi.org/10.1007/s10470-007-9067-3

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