System integration of high voltage electrostatic MEMS actuators

Jean-François Saheb, Jean-François Richard, Mohamad Sawan, Remi Meingan and Yvon Savaria

Article (2007)

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Department:	Department of Electrical Engineering
PolyPublie URL:	https://publications.polymtl.ca/21433/
Journal Title:	Analog Integrated Circuits and Signal Processing (vol. 53, no. 1)
Publisher:	Springer
DOI:	10.1007/s10470-006-9020-x
Official URL:	https://doi.org/10.1007/s10470-006-9020-x
Date Deposited:	18 Apr 2023 15:17
Last Modified:	18 Apr 2023 15:17

Cite in APA 7:	Saheb, J.-F., Richard, J.-F., Sawan, M., Meingan, R., & Savaria, Y. (2007). System integration of high voltage electrostatic MEMS actuators. Analog Integrated Circuits and Signal Processing, 53(1), 27-34. https://doi.org/10.1007/s10470-006-9020-x
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