Guchuan Zhu
, Julien Penet and Lahcen Saydy
Article (2007)
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| Department: | Department of Electrical Engineering |
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| PolyPublie URL: | https://publications.polymtl.ca/21236/ |
| Journal Title: | Journal of Dynamic Systems, Measurement and Control (vol. 129, no. 6) |
| Publisher: | ASM International |
| DOI: | 10.1115/1.2789469 |
| Official URL: | https://doi.org/10.1115/1.2789469 |
| Date Deposited: | 18 Apr 2023 15:17 |
| Last Modified: | 08 Apr 2025 02:08 |
| Cite in APA 7: | Zhu, G., Penet, J., & Saydy, L. (2007). Modeling and control of electrostatically actuated MEMS in the presence of parasitics and parametric uncertainties. Journal of Dynamic Systems, Measurement and Control, 129(6), 786-794. https://doi.org/10.1115/1.2789469 |
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