Nonlinear control of an electrostatic micromirror beyond pull-in with experimental validation

Carlos G. Agudelo, Muthukumaran Packirisamy, Guchuan Zhu and Lahcen Saydy

Article (2009)

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Department:	Department of Electrical Engineering
PolyPublie URL:	https://publications.polymtl.ca/20054/
Journal Title:	Journal of Microelectromechanical Systems (vol. 18, no. 4)
Publisher:	IEEE
DOI:	10.1109/jmems.2009.2021819
Official URL:	https://doi.org/10.1109/jmems.2009.2021819
Date Deposited:	18 Apr 2023 15:14
Last Modified:	25 Sep 2024 15:58

Cite in APA 7:	Agudelo, C. G., Packirisamy, M., Zhu, G., & Saydy, L. (2009). Nonlinear control of an electrostatic micromirror beyond pull-in with experimental validation. Journal of Microelectromechanical Systems, 18(4), 914-923. https://doi.org/10.1109/jmems.2009.2021819
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