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Nonlinear control of an electrostatic micromirror beyond pull-in with experimental validation

Carlos G. Agudelo, Muthukumaran Packirisamy, Guchuan Zhu and Lahcen Saydy

Article (2009)

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Department: Department of Electrical Engineering
PolyPublie URL: https://publications.polymtl.ca/20054/
Journal Title: Journal of Microelectromechanical Systems (vol. 18, no. 4)
Publisher: IEEE
DOI: 10.1109/jmems.2009.2021819
Official URL: https://doi.org/10.1109/jmems.2009.2021819
Date Deposited: 18 Apr 2023 15:14
Last Modified: 05 Apr 2024 11:02
Cite in APA 7: Agudelo, C. G., Packirisamy, M., Zhu, G., & Saydy, L. (2009). Nonlinear control of an electrostatic micromirror beyond pull-in with experimental validation. Journal of Microelectromechanical Systems, 18(4), 914-923. https://doi.org/10.1109/jmems.2009.2021819

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