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A direct-write microfluidic fabrication process for CMOS-based lab-on-chip applications

Ebrahim Ghafar-Zadeh, Mohamad Sawan, Daniel Therriault, Sumitra Rajagopalan and Vamsy P. Chodavarapu

Article (2009)

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Department: Department of Electrical Engineering
Department of Mechanical Engineering
Research Center: Polystim - Neurotechnology Laboratory
PolyPublie URL: https://publications.polymtl.ca/19570/
Journal Title: Microelectronic Engineering (vol. 86, no. 10)
Publisher: Elsevier
DOI: 10.1016/j.mee.2009.02.011
Official URL: https://doi.org/10.1016/j.mee.2009.02.011
Date Deposited: 18 Apr 2023 15:14
Last Modified: 25 Sep 2024 15:57
Cite in APA 7: Ghafar-Zadeh, E., Sawan, M., Therriault, D., Rajagopalan, S., & Chodavarapu, V. P. (2009). A direct-write microfluidic fabrication process for CMOS-based lab-on-chip applications. Microelectronic Engineering, 86(10), 2104-2109. https://doi.org/10.1016/j.mee.2009.02.011

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