<  Back to the Polytechnique Montréal portal

MEMS tunable silicon fabry-perot cavity and applications thereof

Yves-Alain Peter, Jonathan Masson and Raphaël St-Gelais

Patent (2012)

Open Acess document at official publisher
An external link is available for this item
Additional Information: Autre numéro: US20090153844 (demande)
Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/19086/
Official URL: https://patents.google.com/patent/US8174698
Date Deposited: 18 Apr 2023 15:11
Last Modified: 05 Apr 2024 11:01
Cite in APA 7: Peter, Y.-A., Masson, J., & St-Gelais, R. (2012). MEMS tunable silicon fabry-perot cavity and applications thereof. (Patent no. US8174698). https://patents.google.com/patent/US8174698

Statistics

Dimensions

Repository Staff Only

View Item View Item