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Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme

In-Hyouk Song, Yves-Alain Peter and Michel Meunier

Article (2009)

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Department: Department of Engineering Physics
PolyPublie URL: https://publications.polymtl.ca/18917/
Journal Title: Microsystem Technologies (vol. 15, no. 7)
Publisher: Springer
DOI: 10.1007/s00542-009-0823-4
Official URL: https://doi.org/10.1007/s00542-009-0823-4
Date Deposited: 18 Apr 2023 15:15
Last Modified: 05 Apr 2024 11:01
Cite in APA 7: Song, I.-H., Peter, Y.-A., & Meunier, M. (2009). Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme. Microsystem Technologies, 15(7), 973-979. https://doi.org/10.1007/s00542-009-0823-4

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