Sliding mode tracking control of an electrostatic parallel-plate MEM

Marc Gronle, Guchuan Zhu and Lahcen Saydy

Paper (2010)

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Department:	Department of Electrical Engineering
PolyPublie URL:	https://publications.polymtl.ca/18242/
Conference Title:	IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2010)
Conference Location:	Montréal, QC, Canada
Conference Date(s):	2010-07-06 - 2010-07-09
Publisher:	Institute of Electrical and Electronics Engineers
DOI:	10.1109/aim.2010.5695779
Official URL:	https://doi.org/10.1109/aim.2010.5695779
Date Deposited:	18 Apr 2023 15:13
Last Modified:	08 May 2026 10:44

Cite in APA 7:	Gronle, M., Zhu, G., & Saydy, L. (2010, July). Sliding mode tracking control of an electrostatic parallel-plate MEM [Paper]. IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2010), Montréal, QC, Canada. https://doi.org/10.1109/aim.2010.5695779
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